Design, Project management & Manufacturing of turnkey flow solutions

This vaporizing system for advanced liquids and precursors, designed by SERV' INSTRUMENTATION, is based on 3 major innovative technologies: Accurate and stable mass delivery of liquids using Quantim Coriolis flow controllers, patented pneumatic atomization of liquids into micro droplets (< 200 µm), maximised heated recirculating transfer chamber.

ADVANTANGES VS EXISTING SOLUTIONS:

• Total transfer of vapor in the process.
• Plug en Play fluid system
• Materiel quality
• Use on flammable products - Compliant with PED & explosive aeras new directives.

MS100..........10 - 100 g/h
MS1000........100 - 1 000 g/h
0 - 10 g/h Contact us > 1000 g/h Contact us
Vaporizing efficiency : 100%
Settling time or vaporized flow at start-up: (600/flow rate (g/h)) sec

INDUSTRIES: Semicon, Fuel cell, Research