Flow (Measurement & Control)

Thermal mass (capillary type)

Thermal mass (capillary type) Thermal mass (capillary type) Thermal mass (capillary type) Thermal mass (capillary type)

Operation in video


Thermal Mass Flow controllers are designed to precisely measure and control the mass flow rate of clean gases or liquids. They are electronic flowmeters whose primary advantage is insensitivity to changes in fluid pressure and temperature. Their calibration is based on a heat capacity of the fluid being measured, therefore changes in the gas/liquid or concentration will affect the flowmeters calibration. Output signals include voltage or current, and integral control valves are available which provide closed control loop.

Technical bulletins

Manufacturer Brooks Instrument, Emerson Process Management
Fluids Gas, liquids
Sizes 1/8" to 8"
Max pressure & temperature 300 Bar & 120°C
Flow ranges 0.01 Nml/min to 2500 Nl/min (Air @ 20°C, 1013 mbar), controller execution
0.01 Nml/min to 2160 Nm³/h (Air @ 20°C, 1013 mbar), flowmeter execution
Accuracy 0.5% of rate + 0.1% full scale
Rangeability 50:1
Straight run pipes None
Options Integral control valves, Profibus-DP, RS485, ATEX zone 2 ...
Advantages Mass measurement, wide range
Limitations Must be clean fluid, calibration is fluid dependent

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